TiO₂ Titanium dioxide

m  알루미나와 비슷한 기계적, 열적, 화학적 특성을 유지하면서 정전기 발생 원인 제거

m   Application: 고 치밀도로 Scratch 방지 및 저 반사율을 가진 소재

Y₂O₃ Yttrium Oxide

m  희토류 금속인 Yttrium산화물로 내식성, 내 Plasma특성 우수(F/Cl Gas 우수)

m   Application: ETCH, CVD 공정 등 반도체 장비의 챔버내 Ring, Nozzle, Pin

AlN Aluminum Nitride

m  고 치밀도로 내열 및 내식성이 우수, 낮은 열팽창 계수(4.2ppm/℃)

m  Application: 반도체 Tube, OLED용 Crucible, Susceptor, CVD Nozzle, etc

SiC (Silicon Carbide)

m  High Purity Silicon Carbide (SiC): 강한 공유결합으로 이루어진 탄화물 계열로 내마모성,

                                        내 화학성, 내식성, 열전도도가 뛰어남

m   Application: LED Tray, Ring, Cathode 등 반도체 공정에 사용됨.

Ta Tantalum

m  고온 및 화학안정성이 우수하며, 타 물질과 반응하지 않음.

       염산/질산/왕수 등에 우수한 내 산성 갖고 있음.

m   Application: OLED 증착 장비용 Cell 부품 (Heater, Reflector 등) 사용

기타 제품

m  Alumina (Al₂O₃)

m  Sapphire

 

 

TiO₂ Titanium dioxide

m  Eliminate static electricity generation while maintaining mechanical, thermal and chemical

       properties of alumina

m   Application: Material with high density anti-scratch and low reflectivity

Y₂O₃ Yttrium Oxide

m  Yttrium oxide, a rare earth metal, corrosion resistant and excellent internal plasma

      properties (excellent F/Cl gas)

m  Application: Ring, Nozzle and Pin in Chamber of Semiconductor Equipment, including ETCH and CVD Process

AlN Aluminum Nitride

m  High density for high heat resistance and corrosion resistance, low thermal expansion

     factor (4.2 ppm/°C)

m  Application: Semiconductor Tube, Crucible, Susceptor, CVD Nozzle, etc.

SiC (Silicon Carbide)

m  High Purity Silicon Carbide (SiC): Highly bonded carbide series for wear resistance,

       Chemical, corrosion resistant and thermal conductivity is excellent

m   Application: Used in semiconductor processes such as LED Tray, Ring, Cathode, etc.

Ta Tantalum

m  High temperature and chemical stability, not reacting with other substances.

     It has excellent acid resistance to hydrochloric acid/nitric acid/aqua regia, etc.

m  Application: Use of Cell parts (Heater, Reflector, etc.) for OLED deposition equipment

Other products

m  Alumina (Al₂O₃)

m  Sapphire