What is GLMS?

In Korea, there are semiconductor and display manufacturing companies that lead the global industry, including Samsung Electronics, Hynix, LG Display, and Samsung Display. Because toxic substances are used in their manufacturing process, various safety measures are essential.

Our company has particularly focused on the safety of diaphragm valves, which are easily damaged by consumable parts in the gas chamber. The gas chamber has many diaphragm valves. However, a gas chamber usually contains only one gas sensor. It takes time to detect a gas leak because 1) the distance between the sensor and the leak source, and 2) the exhaust gases in the chamber dilute the leaked gas. Additionally, it is difficult to determine the exact source of leakage among many diaphragm valves.

ST Corporation's Gas Leak Monitoring System (GLMS) consists of a sampling case, tubing, valves, and sensors. Each diaphragm valve is sealed with a sampling case and connected to the gas sensor by tubing. Once we detect a leak, we can easily determine the source of the leak by opening and closing each valve.
competitive advantage Compared to traditional methods, GLMS and CLMS can detect the exact source of leaks at an early stage, reducing damage to workers from toxic substances. There are four related patents in Korea, and similar manufacturers have applied for patents in China and Japan.